| 摘要 |
Disclosed is a thin film capacitor which can improve the uniformity of the capacitance while keeping a high capacitance. The thin film capacitor has a lower electrode serving as a trench forming layer where a trench pattern is to be formed, a dielectric film so provided as to cover the lower electrode, and an upper electrode laminated in order on the entire top surface of a substrate. The trench pattern is configured to have a first pattern and a second pattern separate from the first pattern. The first pattern has a plurality of protrusions provided upright at predetermined intervals, and the second pattern has a plurality of recesses provided at predetermined intervals. Trenches are each defined by the outer wall of each protrusion and the inner wall of each recess.
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