摘要 |
An implementation of a Czochralski-type crystal growth has been shown and embodied. More particularly, a furnace with suitable insulation and flow arrangement is shown to improve the cost-efficiency of production of crystals. That is achieved by the shown new hot-zone structure, gas flows and the growth process which can decrease the power consumption, increase the lifetime of hot-zone parts and improve the productivity, e.g., by giving means for opening the hot-zone and easily adapting the hot-zone to a new crystal diameter. |
申请人 |
OKMETIC OYJ;ANTTILA, OLLI;SAARNIKKO, ARI;PALOHEIMO, JARI |
发明人 |
ANTTILA, OLLI;SAARNIKKO, ARI;PALOHEIMO, JARI |