| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating for forming an insulation film which is a composition for forming an insulation film used in electronic devices and the like and gives an insulation film being excellent in film characteristics such as in dielectric constant and mechanical strength, adhesion to substrates and further in the stability of a coating liquid. SOLUTION: The composition for interlayer insulation films comprises the ingredients as described below: (A) an alkoxysilane or a hydrolysate of an acyloxysilane having at least one carbon-carbon double bond, (B) a compound having at least two carbon-carbon double bonds or carbon-carbon triple bonds in the molecule, (C) a≤16C carboxylic acid and (D) a solvent. COPYRIGHT: (C)2009,JPO&INPIT
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