| 摘要 |
PROBLEM TO BE SOLVED: To increase an output, and reduce a noise by use of hot wires in a preheat state that they are heated by heaters. SOLUTION: A detection section structure in a gas rate sensor of the invention has a constitution comprising a sensor (200) provided between protrusion arms (5) on a silicon frame substrate (1), formed from the hot wires (6, 7) on an insulating layer (31) and the heaters (6A, 7A), and detecting an angular speed input in the preheat state that the hot wires (6, 7) are heated by the heaters (6A, 7A). COPYRIGHT: (C)2009,JPO&INPIT
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