| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchannel array having excellent productivity and reliability. SOLUTION: This microchannel array is formed by sticking the front face of a first substrate 10 onto the back face of a second substrate 20, wherein the front face side of the first substrate 10 is equipped with a first hollow 13 having a body part 131 having an inflow port 11 formed on one end, and branched parts 132 formed by being branched plurally from the body part 131 toward the other end; a second hollow 14 having a body part 141 having an outflow port 12 formed on the other end, and branched parts 142 formed by being branched plurally from the body part 141 toward one end, wherein the branched parts 142 are arranged alternately with the branched parts 132 of the first hollow; a wall part 15 for dividing the branched parts 132 of the first hollow from the branched parts 142 of the second hollow; and fine grooves 16 formed on the wall part 15, for connecting the branched parts 132 of the first hollow with the branched parts 142 of the second hollow. The first substrate 10 is warped, and the back face of the second substrate 20 is bent corresponding to warp of the first substrate 10. COPYRIGHT: (C)2009,JPO&INPIT
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