| 发明名称 |
METHOD AND APPARATUS FOR FABRICATING OR ALTERING MICROSTRUCTURES USING LOCAL CHEMICAL ALTERATIONS |
| 摘要 |
A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.
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| 申请公布号 |
US2008236745(A1) |
申请公布日期 |
2008.10.02 |
| 申请号 |
US20070931230 |
申请日期 |
2007.10.31 |
| 申请人 |
GUHA SUPRATIK;HAMANN HENDRIK F;MARCHMAN HERSCHEL M;VON GUTFELD ROBERT J |
发明人 |
GUHA SUPRATIK;HAMANN HENDRIK F.;MARCHMAN HERSCHEL M.;VON GUTFELD ROBERT J. |
| 分类号 |
C23F1/08;B05C11/00;C23C16/00;H01L21/302;H01L21/311;H01L21/3213;H01L21/336;H01L21/461;H01L21/768;H01L29/786 |
主分类号 |
C23F1/08 |
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