发明名称 |
Orientation device for arranging components moving towards each other like a movable slide or table for instruments measuring the thickness of layers has elements and a framework |
摘要 |
<p>A framework (3) and a first element (1) interlink via a first rotational axis so as to rotate. The framework also interlinks with a second element (2) so as to rotate via a second rotational axis. Components moving towards each other like a movable slide or table for instruments measuring the thickness of layers are assigned to the first and second elements so that they move towards each other in compliance with the first and second elements.</p> |
申请公布号 |
DE102008000867(A1) |
申请公布日期 |
2008.10.02 |
申请号 |
DE20081000867 |
申请日期 |
2008.03.27 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
KRUG, FRANZ;MAUL, GUENTER |
分类号 |
F16D3/26 |
主分类号 |
F16D3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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