Valve used as a vacuum switching valve comprises a unit for reducing the passage of electromagnetic radiation in the high frequency and/or microwave regions

摘要

Valve comprises a unit for reducing the passage of electromagnetic radiation in the high frequency and/or microwave regions. Preferred Features: The unit for reducing the passage of electromagnetic radiation comprises a labyrinth or an insert arranged in a valve seat (1). The insert has a beaker- or tubular-shape. The valve has a valve plate (2) with a tubular base body, a valve insert with an outer wall and an insert. The base body and the insert intersect by 5-30 mm, preferably 10-20 mm. The valve is pneumatically or hydraulically operated.