| 摘要 |
<p>An electrostatick chuck which can enhance attraction force for any substrate. The electrostatick chuck (21) comprises a base mount (22) consisting of a body (23) and an insulating film (24), an electrode (25) and an insulating layer (26) laminated on the upper surface of the body (23), and a DC power supply (29) for applying a DC voltage to the electrode (25) wherein the insulating film (24) is formed on the upper surface of the body (23), the electrode (25) is formed on the upper surface of the insulating film (24) and the insulating layer (26) is formed on the upper surface of the electrode (25). The insulating layer (26) has a two-layerstructure of a polyimide layer (27) and a ceramic layer (28) wherein the polyimide layer (27) is formed on the upper surface of the electrode (25), and the ceramic layer (28) is formed on the upper surface of the polyimide layer (27). A substrate K is mounted on the surface of the ceramic layer (28).</p> |
