A METHOD OF IMAGING RADIATION FROM AN OBJECT ON A DETECTION DEVICE AND AN INSPECTION DEVICE FOR INSPECTING AN OBJECT
摘要
<p>A method of imaging radiation from an object on a detection device. The method includes directing a beam of coherent radiation to the object, scanning the beam of radiation over an angle in or out of a plane of incidence relative to the object, and imaging scattered radiation from the object on the detection device.</p>
申请公布号
WO2008118012(A1)
申请公布日期
2008.10.02
申请号
WO2008NL50164
申请日期
2008.03.21
申请人
ASML NETHERLANDS B.V.;SNEL, ROBERT;BLEEKER, ARNO JAN;VAN BRUG, HEDSER
