MOLD AND APPARATUS FOR FORMING A PATTERN, AND METHOD FOR FORMING THE PATTERN

摘要

A mold for pattern formation, a pattern forming apparatus and a pattern forming method are provided to form a dummy pattern and/or a light blocking portion on the mold, thereby preventing resins positioned out of an effective pattern of the mold from hardening to remove a risk that an undesired pattern is formed on a substrate. A mold(10) for pattern formation includes a body(230,330), an effective pattern(EP), and a dummy pattern(DP). The effective pattern is on the body. The dummy pattern is formed along the circumference of the effective pattern. A light blocking portion(270,370) is in an area corresponding to the dummy pattern along the circumference of the effective pattern.