发明名称 POSITIVE RESIST COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
摘要 A positive resist composition, includes: (B) a resin containing a repeating unit represented by formula (Ia) or (Ib) as defined in the specification, which decomposes under an action of an acid to increase a solubility of the resin (B) in an aqueous alkali solution; and (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation, and a pattern forming method uses the composition.
申请公布号 US2008241743(A1) 申请公布日期 2008.10.02
申请号 US20080053675 申请日期 2008.03.24
申请人 FUJIFILM CORPORATION 发明人 MIZUTANI KAZUYOSHI;HIRANO SHUJI;SUGIYAMA SHINICHI
分类号 G03F7/004;G03F7/00 主分类号 G03F7/004
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