发明名称 SEMICONDUCTOR DEVICE CAPABLE OF DECREASING VARIATIONS IN SIZE OF METAL RESISTANCE ELEMENT
摘要 A semiconductor device is provided wherein a foundation insulating film is formed over a semiconductor substrate, a metal resistance element is formed on the foundation insulating film, and contacts are formed at both ends of the metal resistance element in a longitudinal direction of the metal resistance element and connected to the metal resistance element. The foundation insulating film comprises a single upwardly concave curved surface constituting not less than about 40 percent of an upper surface of the metal resistance element between the contacts in the longitudinal direction thereof. The curved surface of the foundation insulating film causes the metal resistance element to comprise a single upwardly concave curved surface constituting not less than about 40 percent of upper and lower surfaces of the metal resistance element between the contacts in the longitudinal direction thereof.
申请公布号 US2008237799(A1) 申请公布日期 2008.10.02
申请号 US20080055947 申请日期 2008.03.26
申请人 RICOH COMPANY, LTD. 发明人 YAMASHITA KIMIHIKO
分类号 H01L29/00 主分类号 H01L29/00
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