发明名称 Blendenanordnung für eine Vakuummesszelle
摘要 <p>A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.</p>
申请公布号 DE112006003162(A5) 申请公布日期 2008.10.02
申请号 DE20061103162T 申请日期 2006.11.13
申请人 INFICON GMBH 发明人 BJOERKMAN, PER;WAELCHLI, URS;HANSELMANN, HANSJAKOB;DURIS, STANISLAV;WUEEST, MARTIN
分类号 G01L19/00;C23C14/54;G01L7/08;G01L9/00 主分类号 G01L19/00
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