METHOD OF MANUFACTURING SENSOR FOR AUTHENTICATING SURFACE SHAPE, AND SENSOR FOR AUTHENTICATING SURFACE SHAPE

摘要

PROBLEM TO BE SOLVED: To lessen the kinds of a device for forming a metal member composing a sensor. SOLUTION: A method for manufacturing the sensor for authenticating surface shape includes: forming first and second conductive wiring by a sputtering method through an interlayer insulating film on the surface of a semiconductor substrate; laminating a second insulating film on a first insulating film by covering the first and second conductive wiring and the interlayer insulating film by the first insulating film; forming a groove arriving from the surface of the second insulating film to the first conductive wiring thereby by removing the first and second insulating films on the first conductive wiring; forming a conductive film covering the second insulating film and a side wall and a bottom of the groove by the sputtering method; exposing the first insulating film by covering the groove by a wider resist film than the width of the groove from upward of the conductive film to regard the resist film as a mask so as to remove the conductive film and the second insulating film; and forming a third insulating film on the first insulating film after removing the resist film so that the surface is on the same surface as the surface of the conductive film. COPYRIGHT: (C)2009,JPO&INPIT