| 摘要 |
PROBLEM TO BE SOLVED: To reduce the aberration of an electron source without lowering a withstand voltage of the electron source. SOLUTION: In this high-resolution X-ray tube having a structure where a magnetic field lens 11 generating a magnetic field between an electron source 1 and an X-ray target 5 is arranged outside a vacuum system, the withstand voltage thereof can be improved by arranging an anode 3 positioned in a vacuum between upper end surface 13 of the yoke of the magnetic field lens 11 and the X-ray target 5 side, and on the electron source 1 side relative to the lower end 15 of a gap (s) of the magnetic field lens 11. In addition, when the anode 3 is formed into a shape projecting toward the incident side of an electron beam, a bright X-ray tube improved in tube current can be provided. COPYRIGHT: (C)2009,JPO&INPIT
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