SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD FOR MANAGING APPARATUS OPERATION PARAMETER, AND PROGRAM

摘要

[PROBLEMS] To solve a problem of not easily knowing one or more recipes which can be affected by a change of a process parameter in conventional group management system. [MEANS FOR SOLVING PROBLEMS] A process information managing apparatus is provided with a recipe storing section which stores two or more recipes, i.e., process-related information stored in two or more control apparatuses, by associating them with two or more control apparatuses; a receiving section which receives process parameter information, i.e., information on a process parameter included in the recipe; a recipe information acquiring section which searches a recipe from the recipe storing section by using the process parameter information, and acquires recipe information, i.e., information on the searched recipe; and an outputting section which outputs the recipe information acquired by the recipe information acquiring section. One or more recipes which can be affected by the change of the process parameter is easily known by using the process information managing apparatus.