| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular speed sensor having a piezoelectric oscillator miniaturized, driven at a desired resonance frequency, as well as obtaining a high Q-value. <P>SOLUTION: The angular speed sensor includes the piezoelectric oscillator, and a detection section. The piezoelectric oscillator comprises: an oscillation section having a base, a fixed end fixed to the base, and a free end separated from the base; and a drive section for generating a flexing oscillations in the oscillation section. The oscillation section has a first support section, four cantilever beams supported by the first support section, and a second support section for supporting the first support section and is provided with the fixed end. The first and second cantilever beams are symmetric with respect to one center line of the first support section; the third and fourth cantilever beams are symmetric to one center line of the first support section; the first and fourth cantilever beams are symmetric to the other center line of the first support section; the second and third cantilever beams are symmetric to the other center line of the first support section; and the detection section is formed above the oscillation section and detects an angular speed of a rotation applied to the oscillation section. <P>COPYRIGHT: (C)2009,JPO&INPIT |
