| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film device capable of suppressing unwanted vibration while ensuring a feeding path to electrodes. <P>SOLUTION: A lower surface electrode 141 and an upper surface electrode 161 are confronted in a confronting area 191 with a piezoelectric thin film 151 therebetween and form a serial arm resonator 101. A lower surface electrode 142 and an upper surface electrode 162 are confronted in a confronting area 193 with the piezoelectric thin film 15 therebetween and form a parallel arm resonator 102. The lower surface electrode 141 and the upper surface electrode 162 are confronted in an area 195 outside free vibration areas 192, 194 with the piezoelectric thin film 15 therebetween and electrically connected by 12 pieces of via-holes 155. The lower surface electrode 142 and an upper surface electrode 163 are confronted in an area 197 outside the free vibration areas 192, 194 with the piezoelectric thin film 15 therebetween and electrically connected by 12 pieces of via-holes 156. The via-holes 155, 156 are filled with a resin 17. <P>COPYRIGHT: (C)2009,JPO&INPIT |
