| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lens cooling system which gives a stable cooling effect to a focusing lens of a galvanosystem. <P>SOLUTION: The lens system cooling system which cools a lens and a lens holder which move in parallel to a laser light axis is provided with: a cooling jacket composed to cover the moving region in a tunnel-like shape; a compressed air flow duct for flowing compressed air to the moving region of the lens and the lens holder, wherein a cooling oil flow duct is provided in the cooling jacket for cooling the cooling jacket itself and for cooling the lens and the lens holder by using heat exchange by radiation between the cooling jacket and the lens and the lens holder, the compressed air duct is provided for blowing the compressed air in the moving region of the lens and the lens holder to promote the heat radiation between the cooling jacket and the lens holder. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
