| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure control valve in which service life of a seal member is elongated, in a pressure control valve used in a chamber performing predetermined processing with respect to material to be processed such as semiconductor wafer or the like. SOLUTION: The pressure control valve comprises: a valve body 61 having an opening 61b connecting a chamber 11 side with a side of exhaust devices 53, 54; a sealing valve element 62 closing the opening; the seal member 62a disposed to the sealing valve element and a protective seal 62b outside the seal member 62a; and a control valve element 63 with no seal member, for opening the opening 61b by predetermined opening. When plasma processing is performed, the control valve element opens the opening by the predetermined opening, and the sealing valve element 62 is evacuated in a valve evacuation part. Since the seal member is sealed to the inside of the protective seal in the valve evacuation part, the seal member is not exposed to the plasma or radical. COPYRIGHT: (C)2009,JPO&INPIT
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