| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that in printed MEMS requiring materials to be jetted in liquid form from an inkjet printer, a structural material is likely to be a polymer, but the polymer is not conductive, normally, and although conductive polymers are available, these materials tend to have a high resistance. SOLUTION: The method is for creating a composite material for micro-electro mechanical systems. The method includes determining a layout for a micro-electro mechanical system device and alternating depositing drops of polymer and drops of conductor to create an interwoven matrix based on the layout. The method also includes the step of forming the micro-electro mechanical system device based on the layout. COPYRIGHT: (C)2009,JPO&INPIT
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