| 摘要 |
Disclosed is a stage apparatus which drives an object, comprising a base member, a first guide member disposed along a guide face of the base member, a second guide member disposed along the guide face so as to intersect with the first guide member, first and second sliders disposed such that the first and second sliders can move along the first and the second guide members, respectively, a connecting member having a flexible structure to connect the first and the second sliders to each other, and a movable stage which is to hold the object and is movably disposed on the guide face, and which is connected to the first and the second sliders.
|
