发明名称 METHOD OF AND APPARATUS FOR MONITORING FLOW OF LUBRICANT VAPOR FORMING LUBRICANT COATINGS OF MAGNETIC DISKS
摘要 A method and an apparatus for monitoring the flow of lubricant vapor forming lubricant coatings of magnetic disks are provided to increase the life span of monitors using piezoelectric crystals by reducing the exposure time of the monitors to lubricant vapor. An apparatus for monitoring the flow of lubricant vapor forming lubricant coatings of magnetic disks comprises a reservoir(24) storing liquid that can be vaporized to form the vapor, a heater, a flow path, and plural monitors for monitoring the flow rate of lubricant vapor in the flow path. The heater heats the liquid in the reservoir into lubricant vapor. The flow path allows for the flow of lubricant vapor from the reservoir to a disk(18) while the disk is placed on a holder(16). The flow path includes an apertured diffuser between the reservoir and the holder while the disk is placed in the flow path and a vapor chamber between the reservoir and the apertured diffuser, and is kept in a vacuum condition while liquid in the reservoir is heated into the lubricant vapor.
申请公布号 KR20080088486(A) 申请公布日期 2008.10.02
申请号 KR20080028776 申请日期 2008.03.28
申请人 INTEVAC, INC. 发明人 PETERSEN CARL;AMES KENNETH
分类号 G11B5/725;G11B5/71;G11B5/842 主分类号 G11B5/725
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