| 摘要 |
PROBLEM TO BE SOLVED: To provide a hardness tester capable of suitably autofocusing, and acquiring highly reliable measurement data of a cavity. SOLUTION: The cavity B formed on a surface of a sample S, and a mask M covering its periphery are projected by pattern projecting means (a CPU 61, a pattern projecting program 63a, a liquid crystal panel 13a, an LCD driver 13b). A predetermined pattern G is projected on the surface of the sample S, and focusing is conducted based on the predetermined pattern G projected by the pattern projecting means by autofocusing means (the CPU 61, an autofocusing program 63b). COPYRIGHT: (C)2009,JPO&INPIT |
