| 摘要 |
PROBLEM TO BE SOLVED: To accurately control depth of a groove by sensing a development endpoint of an original disk in real time when the rugged groove is formed in a resist of an original disk in the inorganic resist of a heat mode. SOLUTION: Development is performed while the original disk is rotated, detection light is focus-controlled to the surface of the resist from the resist surface side simultaneously with development, and a push-pull signal amplitude of the ruggedness is sensed from reflection light from the resist surface. Thereby the development endpoint is sensed. COPYRIGHT: (C)2009,JPO&INPIT |
