发明名称 |
MICRO MOVABLE DEVICE, WAFER, AND METHOD OF MANUFACTURING WAFER |
摘要 |
A micro movable device is made by processing a material substrate of a multilayer structure including a first layer, a second layer having a finely rough region on its surface on the side of the first layer, and an intermediate layer provided between the first and the second layer. The micro movable device includes a first structure formed in the first layer and a second structure formed in the second layer. The second structure includes a portion opposing the first structure via a gap and having a finely rough region on the side of the first structure, and being relatively displaceable with respect to the first structure.
|
申请公布号 |
US2008237757(A1) |
申请公布日期 |
2008.10.02 |
申请号 |
US20080059242 |
申请日期 |
2008.03.31 |
申请人 |
FUJITSU LIMITED;FUJITSU MEDIA DEVICES LIMITED |
发明人 |
INOUE HIROAKI;KATSUKI TAKASHI;ISHIKAWA HIROSHI;NAKAZAWA FUMIHIKO;YAMAJI TAKAYUKI |
分类号 |
H01L29/84;H01L21/02 |
主分类号 |
H01L29/84 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|