Aluminiumlegierungselement mit hervorragender Korrosionsbeständigkeit

摘要

To provide an aluminum alloy or aluminum member having an anodic oxide coating formed thereon, the coating having excellent resistance to gaseous corrosion and resistance to plasma and excellent adhesion, and a member for a vacuum apparatus formed of such an aluminum alloy or aluminum member having excellent corrosion resistance. Moreover, a member having a sufficient voltage resistance is provided to stably keep a plasma state in a process using plasma. The object is substantialized by providing the following: (1) An aluminum alloy or aluminum member, wherein the anodic oxide coating has impedance of at least 107Omega at a frequency of 10-2 Hz, and hardness of at least 400 in Vickers hardness (Hv); or (2) An aluminum alloy or aluminum member, wherein the anodic oxide coating has impedance of at least 108Omega at a frequency of 10-2 Hz, and hardness of at least 350 in Vickers hardness (Hv).