PHASE-SEPARATED DIELECTRIC STRUCTURE FABRICATION PROCESS

摘要

A process for fabricating an electronic device including: depositing a laye r comprising a semiconductor; liquid depositing a dielectric composition comprising a lower-k dielectric material, a higher-k dielectric material, and a liquid, wherein the lower-k dielectric material and the higher-k dielectric material are not pha se separated prior to the liquid depositing; and causing phase separation of the lower-k dielectric material and the higher-k dielectric material to form a phase-separated dielectric structure wherein the lower-k dielectric material is in a higher concentrati on than the higher-k dielectric material in a region of the dielectric structure closest to the layer comprising the semiconductor, wherein the depositing the layer comprising th e semiconductor is prior to the liquid depositing the dielectric composition o r subsequent to the causing phase separation.