| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet delivering apparatus capable of breaking a meniscus formed in a connecting part between a main tank and a sub-tank while the sub-tank for gas-liquid separation between the removable main tank and a delivering head. SOLUTION: The sub-tank 23 installed in the liquid droplet delivering apparatus 1 includes a switching means for switching a condition from a condition that all of a liquid inlet 75a, a liquid outlet 77a and a first opening 78a communicate with each other through an inner space to a condition that only the liquid inlet 75a and the liquid outlet 77a communicate with each other through the inner space when the liquid level becomes to a specified position L or lower in the inner space. COPYRIGHT: (C)2009,JPO&INPIT |
