| 摘要 |
PROBLEM TO BE SOLVED: To provide, as a main object, a liquid treatment method capable of selecting a treatment region by a treatment solution and saving the treatment solution. SOLUTION: The liquid treatment method supplies the treatment solution between a substrate to be treated and a facing member using the substrate to be treated and the facing member disposed at a distance from the substrate where the treatment solution can be held by surface tension, and accordingly, the surface of the substrate is treated. COPYRIGHT: (C)2009,JPO&INPIT
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