| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost washing method of a constituent member having no fear of occurrence of particles after washing. SOLUTION: This washing device is constituted so as to remove an adherend from the surface of the constituent member of a film forming apparatus installed in a treatment atmosphere of the film forming apparatus and equipped with jet parts 3 and 4 for ejecting pressure water to the constituent member. COPYRIGHT: (C)2009,JPO&INPIT
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