| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust remover for substrate capable of efficiently removing dust attached to the surface of a substrate even when the substrate is thin and has poor rigidity. SOLUTION: The dust remover for substrate comprises: a transfer device (2) which horizontally supports the substrate W and transfers the substrate from one side to the other side; a horizontally moving device (20) in which a plurality of cup-like scraping brushes (10) are arranged in the right and left direction orthogonal to the transfer direction of the substrate W so as to be directed up and down, and which makes the scraping brushes (10) perform reciprocative movement in the right and left direction while bringing the scraping brushes (10) into contact with the upper surface and the lower surface of the substrate W; and a rotation device (30) which rotates the respective scraping brushes (10) around the vertical axial center C, wherein the inside of the scraping brushes (10) is connected with a suction type dust collector (35). COPYRIGHT: (C)2009,JPO&INPIT
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