摘要 |
A deflectable structure includes a layer having a first area and a second area, a trench structure in the layer which penetrates the layer and separates the first area from the second area, a first junction between the first area and the second area, and a second junction between the first area and the second area, the first area being permanently moveable from a first, permanent position with regard to the second area to a second position, deflected as compared to the first position, with regard to the second area by applying a force.
|