PART OF VACUUM FILM FORMING APPARATUS AND VACUUM FILM FORMING APPARATUS

摘要

A part of vacuum film forming apparatus as a constituent of vacuum film forming apparatus structured so as to evaporate a thin film forming material in a vacuum vessel and deposit the vapor on a substratum to thereby form a thin film. There is provided part (1) of vacuum film forming apparatus composed of part frame (2) and, integrally superimposed on the surface thereof, thermally sprayed coating (3), characterized in that the sprayed coating (3) at its surface has multiple dents, the dents having a depth of not greater than 10 µm. By virtue of this construction, there can be provided a part of vacuum film forming apparatus realizing stably and effectively preventing of any exfoliation of film forming material adhering to apparatus constituting parts during the operation of film forming, suppressing of an increase of film forming cost and productivity drop of film product attributed to cleaning of film forming apparatus, frequent replacement of constituent parts, etc. and suppressing of any occurrence of microparticles.