| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator that can achieve high-quality laser processings by preventing diffraction light from being mixed with output laser beam. SOLUTION: The gas laser oscillator has a folded resonator where a plurality of folding mirrors M2 and M3 is interposed between a total reflection mirror M4 and a partial reflection mirror M1, wherein three or more optical axes L1 to L3 are arranged in the resonator, the optical axes being folded without intersecting each other, and apertures are arranged so that each of the optical axes are tilted each other. COPYRIGHT: (C)2009,JPO&INPIT |
