| 摘要 |
PROBLEM TO BE SOLVED: To acquire information about only a desired area, without taking information in the periphery of an analytical area in, and to obtain a precise depth-directional distribution of a trace element, when carrying out a secondary ion mass spectrometry, as to a depth-directional element concentration analytical method. SOLUTION: A voltage is impressed to an object to be measured, in one part of a primary ion beam scanning area emitted toward the object to be measured. COPYRIGHT: (C)2009,JPO&INPIT
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