METHOD OF EVALUATING ELECTRIC CHARACTERISTIC ON ELECTRODE INTERFACE

摘要

PROBLEM TO BE SOLVED: To evaluate an electric characteristic of a ferromagnetic substance or a transition metal oxide, under a condition near to an actual device, by promoting an electrochemical reaction on an electrode interface between the ferromagnetic substance or transition metal oxide and an electrode, as to a method of evaluating the electric characteristic in the electrode interface. SOLUTION: The upper electrode 3 is formed by a material raw material onto a sample 2 to be measured, by a several atomic layer unit, when measuring a polarization/electric field hysteresis characteristic of the ferromagnetic substance by a device including an AFM, or when measuring a resistance change characteristic in the transition metal oxide used in ReRAM, and the condition near to the interface between the ferromagnetic substance or transition metal oxide and the upper electrode 3 in the actual device is brought by introducing a required gas such as O2for promoting a reaction of the sample 2 with the upper electrode 3 in the measurement, followed to be heated, so as to measure the hysteresis characteristic or the resistance change characteristic. COPYRIGHT: (C)2009,JPO&INPIT