发明名称 METHOD OF MANUFACTURING SPACER
摘要 A method of manufacturing an L-shaped spacer is described. First, a substrate is provided and a protruding structure is formed thereon. Next, a dielectric material is formed on the substrate and covers the stacked structure. Then, the dielectric material on the top of the protruding structure and on portions of the substrate is removed to form an L-shaped spacer.
申请公布号 US2008242092(A1) 申请公布日期 2008.10.02
申请号 US20070694437 申请日期 2007.03.30
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 WEI KUO-LIANG
分类号 H01L21/311 主分类号 H01L21/311
代理机构 代理人
主权项
地址