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发明名称
利用表面张力降低气体的基板乾燥方法与设备
摘要
本发明系揭露一种使用近接头处理基板的方法,该方法起始于设置一具有位于接近该基板表面之头部表面的头部。该头部具有宽度与长度,并且该头部具有沿着该头部之长度以列状配置的复数孔口。该复数列在该头部之宽度上扩展,并且存在有用以分配一第一流体的一第一孔口群组。该第一流体被分配至该基板的表面,以使一弯液面形成在该基板表面与该头部表面之间。该方法亦包含从该头部之一第二孔口群组将气态二氧化碳输送至该弯液面与该基板之间的一介面。该二氧化碳可协助促进相对于该基板表面之该弯液面上的表面张力降低。
申请公布号
TW200839165
申请公布日期
2008.10.01
申请号
TW096149019
申请日期
2007.12.20
申请人
兰姆研究公司
发明人
约翰M 德赖瑞厄斯;保罗A 克透;麦可 瑞夫肯;密克海尔 克罗立克;艾瑞克 弗利尔;卡那 米凯俐茜可;佛礼兹C 瑞德克
分类号
F26B5/00(2006.01)
主分类号
F26B5/00(2006.01)
代理机构
代理人
许峻荣
主权项
地址
美国
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