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发明名称
Method of preventing cracking in optical quality silica layers
摘要
申请公布号
EP1352991(B1)
申请公布日期
2008.10.01
申请号
EP20030100161
申请日期
2003.01.28
申请人
DALSA SEMICONDUCTOR INC.
发明人
QUELLET, LUC;LACHANCE, JONATHAN;ARCHAMBAULT, SYLVIE
分类号
C23C16/56;C23C16/40;G02B6/12;G02B6/132
主分类号
C23C16/56
代理机构
代理人
主权项
地址
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