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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03174773(A)
申请公布日期
1991.07.29
申请号
JP19900304833
申请日期
1990.11.09
申请人
NEC KANSAI LTD
发明人
MIZUGUCHI TAKASHI
分类号
H01L29/861;H01L21/28;H01L29/43
主分类号
H01L29/861
代理机构
代理人
主权项
地址
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