| 摘要 |
A method for preparing a magnesium oxide film is provided to produce the magnesium oxide film having high ultraviolet transmittance and high sputter resistance using a coating method. A method for preparing a magnesium oxide film includes a step of applying a magnesium oxide particle dispersion onto a substrate, and drying and firing the coated substrate to obtain the magnesium oxide film having a film thickness of 100-1000 nm and a transmittance of white light of 95% or more. The magnesium oxide particle dispersion comprises dispersed magnesium oxide fine particles having a D50, measured by a dynamic light scattering method, of 5-40 nm, contains a metal-containing compound except an oxide containing alkaline earth metal, rare earth metal, or metal in a group 12, group 13, group 14, or group 15 on the periodic table in an amount sufficient to provide a total mole content of metal contained in the compound in the range of 1.5-3.5 moles based on 100 moles of magnesium oxide, and comprises a monovalent alcohol having 3-5 carbon atoms as a dispersing medium. Further, the metal-containing compound except the oxide is dissolved in the dispersing medium.
|
