| 摘要 |
A friction vacuum pump ( 1 ) has at least one turbomolecular pump stage ( 6, 7 ) with a molecular pump stage ( 12, 13, 15 ) that is subsequently connected on the pressure side ( 3 ), and with a transition stage ( 23 ) mounted between the turbomolecular pump stage and the molecular pump stage. In order to improve the transition from the turbomolecular zone to the molecular zone, the transition stage has a flow section that is continuously tapered in the tangential by limiting surfaces ( 27, 28 ). |
