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发明名称
Method and apparatus for localized liquid treatment of the surface of a substrate
摘要
申请公布号
EP1168419(B1)
申请公布日期
2008.10.01
申请号
EP20000870135
申请日期
2000.06.19
申请人
INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM
发明人
MERTENS, PAUL;MEURIS, MARC;HEYNS, MARC
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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