发明名称 |
Mold structure, imprinting method using the same, magnetic recording medium and production method thereof |
摘要 |
The present invention provides a mold structure including: a concavo-convex pattern formed on its surface, wherein the mold structure is used for transferring the concavo-convex pattern onto an imprint resist layer formed on a surface of a substrate having a thickness of 0.3mm to 2.0mm by placing the concavo-convex pattern against the imprint resist layer, and wherein a thickness Dm (mm) of the mold structure, a thickness Ds (mm) of the substrate and a curl amount C (mm) of the mold structure satisfy the relationship 0.01‰¤10,000×(Dm 3 /Ds 3 ) 1/2 ×C 2 ‰¤250.
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申请公布号 |
EP1975704(A2) |
申请公布日期 |
2008.10.01 |
申请号 |
EP20080153536 |
申请日期 |
2008.03.28 |
申请人 |
FUJIFILM CORPORATION |
发明人 |
KENICHI, MORIWAKI;TOSHIHIRO, USA;MASAKAZU, NISHIKAWA |
分类号 |
G03F7/00;B29C33/42;B29C45/26;G11B5/855;H01L21/027 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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