发明名称 Mold structure, imprinting method using the same, magnetic recording medium and production method thereof
摘要 The present invention provides a mold structure including: a concavo-convex pattern formed on its surface, wherein the mold structure is used for transferring the concavo-convex pattern onto an imprint resist layer formed on a surface of a substrate having a thickness of 0.3mm to 2.0mm by placing the concavo-convex pattern against the imprint resist layer, and wherein a thickness Dm (mm) of the mold structure, a thickness Ds (mm) of the substrate and a curl amount C (mm) of the mold structure satisfy the relationship 0.01‰¤10,000×(Dm 3 /Ds 3 ) 1/2 ×C 2 ‰¤250.
申请公布号 EP1975704(A2) 申请公布日期 2008.10.01
申请号 EP20080153536 申请日期 2008.03.28
申请人 FUJIFILM CORPORATION 发明人 KENICHI, MORIWAKI;TOSHIHIRO, USA;MASAKAZU, NISHIKAWA
分类号 G03F7/00;B29C33/42;B29C45/26;G11B5/855;H01L21/027 主分类号 G03F7/00
代理机构 代理人
主权项
地址