| 摘要 |
A heating apparatus is provided to reduce a thickness of a base body and to generation of cracks by arranging heating members in a spiral shape on the same plane. A base body(11) is composed of ceramic and includes a heating surface. A first heating member(12) and a second heating member(13) are embedded in the base body and have temperature control functions. Each of the first and second heating members has a spiral shape in a non-contacting state from a central part of the base body to an outer circumferential part of the base body in the same plane parallel to the heating surface of the base body. One of the first and second heating elements includes a high heating density part on the central part of the base body, and a low heating density part on a peripheral part side of the base body. The other of the first and second heating members includes a low heating density part on the central part of the base body, and a high heating density part on the peripheral part of the base body.
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