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发明名称
method for fabricating semiconductor device
摘要
申请公布号
KR100861282(B1)
申请公布日期
2008.10.01
申请号
KR20020031138
申请日期
2002.06.03
申请人
发明人
分类号
H01L27/092;H01L21/8228;H01L21/8238
主分类号
H01L27/092
代理机构
代理人
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