| 摘要 |
A laser processing apparatus is provided to convert a laser beam of a processing workpiece into a circularly polarized light and obtain processed holes having high circularity by coating a deflection mirror. A laser processing apparatus comprises a laser oscillator(21), a deflection mirror, and a focusing lens(47). The laser oscillator outputs a processing laser beam(L) of straight polarized light. The deflection mirror deflects the processing laser beam. The focusing lens focuses the processing laser beam on a processing workpiece(12). The processing laser beam is projected on the deflection mirror to convert the processing laser beam into a circularly polarized light. A spectroscopic unit(31) branches the processing laser beam into first and second processing laser beams(La,Lb). The first and second processing laser beams are projected together on the deflection mirror.
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