| 发明名称 |
Manufacturing method for surface modified carbon nanotube material |
| 摘要 |
<p>A carbon nanotube material (26) is exposed to ultraviolet rays (21), and a silicon-containing compound (22) capable of modifying the surface of the carbon nanotube material in combination with the ultraviolet rays is supplied to thereby modify the surface of the carbon nanotube material.</p> |
| 申请公布号 |
EP1976041(A2) |
申请公布日期 |
2008.10.01 |
| 申请号 |
EP20080152545 |
申请日期 |
2008.03.10 |
| 申请人 |
FUJITSU SEMICONDUCTOR LIMITED |
发明人 |
ASANO, KOJI |
| 分类号 |
H01L27/32;B82Y10/00;B82Y30/00;B82Y40/00;C01B31/02;H01L23/367;H01L23/373;H01L23/552;H01L51/05;H01L51/30 |
主分类号 |
H01L27/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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